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An edition of Post-Processing Techniques for Integrated MEMS (2005)

Post-processing techniques for integrated MEMS

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Post-processing techniques for integrated MEM...
Sherif Sedky, Sherif Sedky
Post-processing techniques for integrated MEMS by Sherif Sedky, Sherif Sedky
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Last edited by Open Library Bot
December 3, 2010 | History
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An edition of Post-Processing Techniques for Integrated MEMS (2005)

Post-processing techniques for integrated MEMS

by

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Publish Date
Publisher
Artech House
Language
English
Pages
207

Subjects

Microelectromechanical systems
Edition Availability
Cover of: Post-processing techniques for integrated MEMS
Post-processing techniques for integrated MEMS
2006, Artech House
in English
  • Nearby Libraries
Cover of: Post-Processing Techniques for Integrated MEMS
Post-Processing Techniques for Integrated MEMS
October 31, 2005, Artech House Publishers
Hardcover in English
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Book Details

Edition Notes

Includes bibliographical references and index

Published in
Boston
Series
Microelectromechanical systems series

Classifications

Library of Congress
TK7875 .S43 2006

The Physical Object

Pagination
xiv, 207 p. :
Number of pages
207

Edition Identifiers

Open Library
OL17187641M
ISBN 10
1580539017
LCCN
2005050833
OCLC/WorldCat
61200754
LibraryThing
6555573

Work Identifiers

Work ID
OL8941884W

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