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An edition of Post-process techniques for integrated MEMS (2005)

Post-process techniques for integrated MEMS

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Post-process techniques for integrated MEMS
Sherif Sedky, Sherif Sedky
Post-process techniques for integrated MEMS by Sherif Sedky, Sherif Sedky
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Last edited by WorkBot
December 10, 2009 | History
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An edition of Post-process techniques for integrated MEMS (2005)

Post-process techniques for integrated MEMS

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Publish Date
Publisher
Artech House
Language
English
Pages
207
Edition Availability
Cover of: Post-process techniques for integrated MEMS
Post-process techniques for integrated MEMS
2005, Artech House
in English
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Book Details

Edition Notes

Published in
Boston, MA

Classifications

Library of Congress
TK

The Physical Object

Pagination
xiv, 207 p. :
Number of pages
207

Edition Identifiers

Open Library
OL22720494M
ISBN 10
1580539017
LibraryThing
6555573

Work Identifiers

Work ID
OL8941883W

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