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Previews available in: English
Showing 3 featured editions. View all 3 editions?
Edition | Availability |
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1
Handbook of semiconductor wafer cleaning technology: science, technology, and applications
1993, Noyes Publications
in English
0815513313 9780815513315
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2
Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications (Materials Science and Process Technology Series)
August 1, 1993, Noyes Publications
Hardcover
in English
0815513313 9780815513315
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Libraries near you:
WorldCat
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3
Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology and Applications
1993, Elsevier Science & Technology Books
in English
0815517726 9780815517726
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Libraries near you:
WorldCat
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Book Details
First Sentence
"The importance of clean substrate surfaces in the fabrication of semiconductor microelectronic devices has been recognized since the dawn of solid-state device technology in the 1950s."
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