An edition of Techniques and challenges for 300 mm silicon (1999)

Techniques and challenges for 300 mm silicon

processing, characterization, modelling and equipment : proceedings of Symposium F on Techniques and Challenges for 300 mm Silicon of the E-MRS 1998 Spring Conference, Strasbourg, France, 16-19 June 1998

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Last edited by ImportBot
July 31, 2020 | History
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An edition of Techniques and challenges for 300 mm silicon (1999)

Techniques and challenges for 300 mm silicon

processing, characterization, modelling and equipment : proceedings of Symposium F on Techniques and Challenges for 300 mm Silicon of the E-MRS 1998 Spring Conference, Strasbourg, France, 16-19 June 1998

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Elsevier
Language
English
Pages
297

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Subjects
Congresses, Semiconductor wafers, Semiconductors

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Edition Availability
Cover of: Techniques and challenges for 300 mm silicon
Techniques and challenges for 300 mm silicon: processing, characterization, modelling and equipment : proceedings of Symposium F on Techniques and Challenges for 300 mm Silicon of the E-MRS 1998 Spring Conference, Strasbourg, France, 16-19 June 1998
1999, Elsevier
in English
  • Not in Library
Libraries near you: WorldCat
Cover of: Techniques and Challenges for 300 mm Silicon
Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment (European Materials Research Society Symposia Proceedings)
September 1, 1999, Elsevier Science
Hardcover in English
Libraries near you: WorldCat
Cover of: Techniques and Challenges for 300 mm Silicon
Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment (European Materials Research Society Symposia Proceedings)
September 1, 1999, Elsevier Science
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references.
"Reprinted from Microelectronic engineering, vol. 45/2-3"--T.p. verso.

Published in
Amsterdam, New York
Series
European Materials Research Society symposia proceedings ;, vol. 81, European Materials Research Society symposia proceedings ;, v. 81.
Genre
Congresses.
Other Titles
Techniques and challenges for three hundred mm silicon

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7871.85 .S95344 1998, TK7871.85.S95344

The Physical Object

Pagination
vi, 85-297 p. :
Number of pages
297

ID Numbers

Open Library
OL6804322M
ISBN 10
0080436099
LCCN
00266835
Goodreads
3918354

Source records

Better World Books record
Library of Congress MARC record

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History

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July 31, 2020 Edited by ImportBot import existing book
December 6, 2010 Edited by Open Library Bot Added subjects from MARC records.
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 10, 2009 Created by WorkBot add works page