An edition of Book of SEMI standards, 1980 (1980)

Book of SEMI standards, 1980.

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Book of SEMI standards, 1980.
Semiconductor Equipment and Ma ...
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Last edited by Open Library Bot
December 10, 2009 | History
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An edition of Book of SEMI standards, 1980 (1980)

Book of SEMI standards, 1980.

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Publish Date
Publisher
Semiconductor Equipment and Materials Institute
Language
English

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Edition Availability
Cover of: Book of SEMI standards, 1980.
Book of SEMI standards, 1980.
1980, Semiconductor Equipment and Materials Institute
in English
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Book Details

Table of Contents

v. 1. Chemicals, equipment, materials, packages, photomask.
v. 2. Test methods.

Edition Notes

Includes bibliographical references.

Published in
Mt. View, CA

Classifications

Dewey Decimal Class
621.3815/2/0218
Library of Congress
TK7871.85 .S46 1980

The Physical Object

Pagination
2 v. :

ID Numbers

Open Library
OL4136264M
LCCN
80114183

Source records

Library of Congress MARC record

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History

Download catalog record: RDF / JSON
December 5, 2010 Edited by Open Library Bot Added subjects from MARC records.
December 10, 2009 Created by WorkBot add works page