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"Nano- and Microelectromechanical Systems builds the theoretical foundation needed to develop, analyze, and prototype NEMS and MEMS, their components, and their structures. It provides the background engineers need to model, design, simulate, control, implement, and deploy NEMS and MEMS. Most importantly, it prepares them to continue research in this challenging field and contribute to its further advancement."--BOOK JACKET.
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Subjects
Microelectromechanical systems, Nanotechnology, Microelectronics, Electromechanical devices, Engineering, Microsystèmes électromécaniques, Nanotechnologie, TECHNOLOGY & ENGINEERING / Mechanical, Elektromechanisches Bauelement, Mikromechanik, Mikrosystemtechnik, Microeletrônica, NanotecnologiaShowing 8 featured editions. View all 8 editions?
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Edition Notes
Includes bibliographical references and index.
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The Physical Object
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