Micromachining and microfabrication process technology XIV

27 January 2009, San Jose, California, United States

Micromachining and microfabrication process t ...
Mary Ann Perez-Maher, Jung-Chi ...
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November 14, 2020 | History

Micromachining and microfabrication process technology XIV

27 January 2009, San Jose, California, United States

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Publish Date
Publisher
SPIE
Language
English

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Book Details


Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash
Series
Proceedings of SPIE -- v. 7204, Proceedings of SPIE--the International Society for Optical Engineering -- v. 7204.
Other Titles
Micromachining and microfabrication process technology 14, Micromachining and microfabrication process technology fourteen

Classifications

Library of Congress
QC176.8.M5 M525 2009

The Physical Object

Pagination
1 v. (various pagings)

Edition Identifiers

Open Library
OL31161485M
ISBN 10
0819474509
ISBN 13
9780819474506
LCCN
2010287958
OCLC/WorldCat
318214136

Work Identifiers

Work ID
OL23313382W

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