| Record ID | marc_loc_2016/BooksAll.2016.part37.utf8:192282786:1578 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part37.utf8:192282786:1578?format=raw |
LEADER: 01578cam a22003617a 4500
001 2010287958
003 DLC
005 20110527082815.0
008 100514s2009 waua b 101 0 eng d
010 $a 2010287958
020 $a9780819474506
020 $a0819474509
035 $a(OCoLC)ocn318214136
040 $aLHL$cLHL$dDLC
042 $alccopycat
050 00 $aQC176.8.M5$bM525 2009
245 00 $aMicromachining and microfabrication process technology XIV :$b27 January 2009, San Jose, California, United States /$cMary-Ann Maher, Jung-Chih Chiao, Paul J. Resnick, editors ; sponsored by SPIE ; symposium cosponsors, Texas Instruments Inc. (United States) ... [et al.].
246 3 $aMicromachining and microfabrication process technology 14
246 3 $aMicromachining and microfabrication process technology fourteen
260 $aBellingham, Wash. :$bSPIE,$cc2009.
300 $a1 v. (various pagings) :$bill. ;$c28 cm.
490 1 $aProceedings of SPIE,$x0277-786X ;$vv. 7204
504 $aIncludes bibliographical references and index.
650 0 $aMicromachining$vCongresses.
650 0 $aMicrofabrication$vCongresses.
650 0 $aElectromechanical devices$xDesign and construction$vCongresses.
650 0 $aMiniature electronic equipment$xDesign and construction$vCongresses.
700 1 $aPerez-Maher, Mary Ann.
700 1 $aChiao, Jung-Chih.
700 1 $aResnick, Paul J.
710 2 $aSPIE (Society)
710 2 $aTexas Instruments Incorporated.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 7204.