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Edition | Availability |
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Helium ion microscopy: principles and applications
2013, Springer
in English
1461486599 9781461486596
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Book Details
Table of Contents
Introduction to Helium Ion Microscopy --
Microscopy with Ions: A Brief History --
Operating the Helium Ion Microscope --
Ion-Solid Interactions and Image Formation --
Charging and Damage --
Microanalysis with HIM --
Ion-Generated Damage --
Working with Other Ion beams --
Patterning and Nanofabrication.
Edition Notes
Includes bibliographical references (pages 61-62) and index.
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Feedback?September 13, 2021 | Edited by ImportBot | import existing book |
November 12, 2020 | Created by MARC Bot | import new book |