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Silicon, Semiconductors, Testing, Congresses, DefectsEdition | Availability |
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1
Planar test structures for characterizing impurities in silicon
1976, U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
in English
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Edition Notes
Includes bibliographical references.
"Presented as an invited paper ... at the Large-Scale Integration (LSI) Process Technology/Semiconductor Preparation and Characterization Session of the Electrochemical Society Meeting in Toronto, Canada on May 14, 1975."
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