An edition of Planar test structures for characterizing impurities in silicon (1976)

Planar test structures for characterizing impurities in silicon

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Planar test structures for characterizing imp ...
M. G. Buehler ... [et al.].
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October 9, 2020 | History
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An edition of Planar test structures for characterizing impurities in silicon (1976)

Planar test structures for characterizing impurities in silicon

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Publish Date
Publisher
U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
Language
English
Pages
25

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Subjects
Silicon, Semiconductors, Testing, Congresses, Defects
Edition Availability
Cover of: Planar test structures for characterizing impurities in silicon
Planar test structures for characterizing impurities in silicon
1976, U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references.
"Presented as an invited paper ... at the Large-Scale Integration (LSI) Process Technology/Semiconductor Preparation and Characterization Session of the Electrochemical Society Meeting in Toronto, Canada on May 14, 1975."

Published in
Washington
Series
Semiconductor measurement technology, National Bureau of Standards special publication ; 400-21, NBS special publication ;, 400-21.

Classifications

Dewey Decimal Class
602/.1 s, 620.1/93
Library of Congress
QC100 .U57 no. 400-21, TK7871.85 .U57 no. 400-21

The Physical Object

Pagination
v, 25 p. :
Number of pages
25

ID Numbers

Open Library
OL4855647M
LCCN
75619390
OCLC/WorldCat
1974783

Source records

Library of Congress MARC record
marc_columbia MARC record

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October 9, 2020 Created by MARC Bot import existing book