High Permittivity Gate Dielectric Materials
by Samares Kar
"The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, including, topics such as MOSFET basics and characteristics, hafnium-based gate dielectric materials, Hf-based gate dielectric processing, metal gate electrodes, flat-band and threshold voltage tuning, channel mobility, high-k gate stack degradation and reliability, lanthanide-based high-k gate stack materials, ternary hafnia and lanthania based high-k gate stack films, crystalline high-k oxides, high mobility substrates, and parameter extraction. Each chapter begins with the basics necessary for understanding the topic, followed by a comprehensive review of the literature, and ultimately graduating to the current status of the technology and our scientific understanding and the future prospects."
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| Edition | Availability |
|---|---|
1
High Permittivity Gate Dielectric Materials
Aug 23, 2016, Springer
paperback
3662501384 9783662501382
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2
High Permittivity Gate Dielectric Materials
2013, Springer Berlin Heidelberg, Imprint: Springer
electronic resource /
in English
3642365353 9783642365355
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