Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II

29-30 January 1998, San Jose, California

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Last edited by ImportBot
August 4, 2020 | History

Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II

29-30 January 1998, San Jose, California

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
186

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Previews available in: English

Book Details


Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series ;, v. 3275, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 3275.

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7871.85 .F6223 1998, TK7871.85.F6223 1998

The Physical Object

Pagination
vii, 186 p. :
Number of pages
186

ID Numbers

Open Library
OL464999M
Internet Archive
isbn_0819427144_3275
ISBN 10
0819427144
LCCN
98184987
OCLC/WorldCat
38957879
Goodreads
745742

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History

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August 4, 2020 Edited by ImportBot import existing book
March 12, 2019 Created by MARC Bot import existing book