| Record ID | ia:isbn_0819427144_3275 |
| Source | Internet Archive |
| Download MARC XML | https://archive.org/download/isbn_0819427144_3275/isbn_0819427144_3275_marc.xml |
| Download MARC binary | https://www.archive.org/download/isbn_0819427144_3275/isbn_0819427144_3275_meta.mrc |
LEADER: 01236cam a2200289 a 4500
001 98184987
003 DLC
005 19990219153555.5
008 980415s1998 wau b 101 0 eng d
010 $a 98184987
020 $a0819427144
035 $a(OCoLC)38957879
040 $aCU-S$cCU-S$dDLC
042 $alccopycat
050 04 $aTK7871.85$b.F6223 1998
082 00 $a621.3815/2$221
245 00 $aFlatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II :$b29-30 January 1998, San Jose, California /$cJohn C. Stover, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering.
260 $aBellingham, Wash., USA :$bSPIE,$cc1998.
300 $avii, 186 p. :$bill. ;$c28 cm.
490 1 $aSPIE proceedings series ;$vv. 3275
504 $aIncludes bibliographical references and index.
650 0 $aSemiconductor wafers$xMeasurement$xCongresses.
650 0 $aSurface roughness$xMeasurement$xCongresses.
650 0 $aFlatness measurement$xCongresses.
700 1 $aStover, John C.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 3275.