Diagnostic techniques for semiconductor materials processing

symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

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July 31, 2020 | History

Diagnostic techniques for semiconductor materials processing

symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

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Publish Date
Language
English
Pages
505

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Book Details


Edition Notes

Includes bibliographical references and indexes.
Papers presented at the symposium held as part of the 1993 Fall Meeting of the Materials Research Society in Boston, Mass.

Published in
Pittsburgh, Pa
Series
Materials Research Society symposium proceedings ;, v. 324, Materials Research Society symposia proceedings ;, v. 324.

Classifications

Dewey Decimal Class
621.3815/2/0287
Library of Congress
TK7871.85 .D497 1994

The Physical Object

Pagination
xv, 505 p. :
Number of pages
505

Edition Identifiers

Open Library
OL1095840M
ISBN 10
1558992235
LCCN
94020397
OCLC/WorldCat
30624091
Goodreads
3604390

Work Identifiers

Work ID
OL18953006W

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July 31, 2020 Edited by ImportBot import existing book
February 18, 2019 Created by MARC Bot import existing book