An edition of Emerging lithographic technologies IV (2000)

Emerging lithographic technologies IV

28 February-1 March, 2000, Santa Clara, USA

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Cover of: Emerging lithographic technologies IV by Elizabeth A. Dobisz, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH.
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Last edited by MARC Bot
July 12, 2024 | History
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An edition of Emerging lithographic technologies IV (2000)

Emerging lithographic technologies IV

28 February-1 March, 2000, Santa Clara, USA

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
900

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Previews available in: English

Subjects
Electron beam Lithography, X-rays, X-ray lithography, Congresses, Masks (Electronics), Industrial applications, Microlithography, X-rays, industrial applications, Lithography, electron beam

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Edition Availability
Cover of: Emerging lithographic technologies IV
Emerging lithographic technologies IV: 28 February-1 March, 2000, Santa Clara, USA
2000, SPIE
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash
Series
Proceedings of SPIE,, v. 3997, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 3997.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7874 .E525 2000, TK7874.E525 2000

The Physical Object

Pagination
xv, 900 p. :
Number of pages
900

ID Numbers

Open Library
OL3963473M
ISBN 10
0819436151
LCCN
2001267776
OCLC/WorldCat
44738861
Goodreads
1965343

Source records

Scriblio MARC record
Better World Books record
Library of Congress MARC record
Internet Archive item record
marc_columbia MARC record

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July 12, 2024 Edited by MARC Bot import existing book
July 8, 2023 Edited by ImportBot import existing book
July 31, 2020 Edited by ImportBot import existing book
February 18, 2019 Created by MARC Bot import existing book