An edition of Proceedings of the symposia on Electrochemical Processing in ULSI Fabrication I (1999)

Proceedings of the symposia on Electrochemical Processing in ULSI Fabrication I

and Interconnect and Contact Metallization--Materials, Processes, and Reliability

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Cover of: Proceedings of the symposia on Electrochemical Processing in ULSI Fabrication I by editors, P.C. Andricacos ... [et al.] ; Dielectric Science and Technology, Electronics, and Electrodeposition Divisions [of the Electrochemical Society].
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Last edited by ImportBot
January 14, 2023 | History
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An edition of Proceedings of the symposia on Electrochemical Processing in ULSI Fabrication I (1999)

Proceedings of the symposia on Electrochemical Processing in ULSI Fabrication I

and Interconnect and Contact Metallization--Materials, Processes, and Reliability

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Electrochemical Society
Language
English
Pages
274

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Previews available in: English

Subjects
Electric contacts, Congresses, Integrated circuits, Semiconductors, Electrochemistry, Design and construction

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Edition Availability
Cover of: Proceedings of the symposia on Electrochemical Processing in ULSI Fabrication I
Proceedings of the symposia on Electrochemical Processing in ULSI Fabrication I: and Interconnect and Contact Metallization--Materials, Processes, and Reliability
1999, Electrochemical Society
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographic references and indexes.
"The Symposium on Electrochemical Processing in ULSI Fabrication I was held on May 4 and 5, 1998 in San Diego, California in the context of the 193th[sic] meeting of the Electrochemical Society ... This symposium on Interconnect and Contact Metallization: Materials, Processes, and Reliability was held in Boston during the 194th meeting of The Electrochemical Society, November 1-6, 1998."--Preface.

Published in
Pennington, New Jersey
Series
Proceedings ;, v. 98-6, Proceedings (Electrochemical Society) ;, v. 98-6.
Genre
Congresses.
Other Titles
Electrochemical processing in ULSI fabrication, Interconnect and contact metallization: materials, processes, and reliability

Classifications

Dewey Decimal Class
621.39/5
Library of Congress
TK7874 .P75177 1999

The Physical Object

Pagination
viii, 274 p. :
Number of pages
274

ID Numbers

Open Library
OL53514M
Internet Archive
proceedingsofsym0000unse_f4t4
ISBN 10
1566772001
LCCN
99062262
OCLC/WorldCat
41927520

Source records

Scriblio MARC record
Library of Congress MARC record
Internet Archive item record
Promise Item

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History

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January 14, 2023 Edited by ImportBot import existing book
February 17, 2019 Created by MARC Bot import existing book