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Plasma etching processes for sub-quarter micron devices: proceedings of the International Symposium
2000, Electrochemical Society.
in English
1566772532 9781566772532
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Edition Notes
"This proceedings volume contains the papers presented at the symposium on Plasma Etching Processes for Sub-Quarter Micron Devices. The symposium ... was held in Honolulu, HI, October 17-22, 1999 ..."--Preface.
Includes bibliographic references and indexes.
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