Advances in resist materials and processing technology XXIV

26-28 February, 2007, San Jose, California, USA

Advances in resist materials and processing t ...
Qinghuang Lin
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February 10, 2019 | History

Advances in resist materials and processing technology XXIV

26-28 February, 2007, San Jose, California, USA

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Publish Date
Language
English
Pages
1348

Buy this book

Book Details


Edition Notes

Previous conference proceedings entitled: Advances in resist technology and processing.

Includes bibliographical references and author index.

Published in
Bellingham, Wash
Series
Proceedings of SPIE -- v. 6519, Proceedings of SPIE--the International Society for Optical Engineering -- v. 6519.
Genre
Congresses

Classifications

Library of Congress
TK7874 .A25 2007, TK7874.A25 2007

The Physical Object

Pagination
2 v. :
Number of pages
1348

Edition Identifiers

Open Library
OL23945578M
ISBN 10
0819466387
ISBN 13
9780819466389
LCCN
2009284505

Work Identifiers

Work ID
OL18664339W

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