Advances in resist materials and processing technology XXIV

26-28 February, 2007, San Jose, California, USA

Advances in resist materials and processing t ...
Qinghuang Lin
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Last edited by MARC Bot
July 31, 2019 | History

Advances in resist materials and processing technology XXIV

26-28 February, 2007, San Jose, California, USA

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Publish Date
Publisher
SPIE
Language
English

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Book Details


Edition Notes

Previous conference proceedings entitled: Advances in resist technology and processing.

Includes bibliographical references and author index.

Published in
Bellingham, Wash
Series
Proceedings of SPIE -- v. 6519, Proceedings of SPIE--the International Society for Optical Engineering -- v. 6519.
Genre
Congresses

Classifications

Library of Congress
TK7874 .A25 2007

The Physical Object

Pagination
2 v. :

Edition Identifiers

Open Library
OL24063277M
ISBN 10
0819466387
ISBN 13
9780819466389
LCCN
2009284505

Work Identifiers

Work ID
OL18664339W

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 31, 2019 Edited by MARC Bot associate edition with work OL18664339W
March 2, 2010 Created by ImportBot Imported from Library of Congress MARC record