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Previews available in: English
Subjects
Semiconductors, Etching, Plasma etching, Plasma (ionized gases)Showing 1 featured edition. View all 1 editions?
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1
Plasma processes for semiconductor fabrication
1999, Cambridge University Press
in English
0521591759 9780521591751
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Edition Notes
Includes bibliographical references (p. 205-211) and index.
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Feedback?August 23, 2020 | Edited by ImportBot | import existing book |
April 28, 2010 | Edited by Open Library Bot | Linked existing covers to the work. |
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