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Previews available in: English
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Comprehensive Microsystems
2007, Elsevier Science & Technology Books
in English
0444521909 9780444521903
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Book Details
Table of Contents
v. 1. Materials. Fabrication and packaging. Electronics and system design
v. 2. Actuation mechanism. Physical sensing. Chemical and biological systems
v. 3. Optical systems. Industrial applications. Emerging topics.
Edition Notes
Includes bibliographical references and index.
Classifications
The Physical Object
Edition Identifiers
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April 20, 2023 | Edited by ImportBot | import existing book |
August 2, 2020 | Edited by ImportBot | import existing book |
February 7, 2019 | Created by MARC Bot | import existing book |