An edition of The Capabilities and limitations of auger sputter profiling for studies of semiconductors (1981)

The Capabilities and limitations of auger sputter profiling for studies of semiconductors

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S.A Schwarz ... [et al.] ; spo ...
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Last edited by MARC Bot
February 12, 2019 | History
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An edition of The Capabilities and limitations of auger sputter profiling for studies of semiconductors (1981)

The Capabilities and limitations of auger sputter profiling for studies of semiconductors

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Publish Date
Publisher
U.S. Dept. of Commerce, National Bureau of Standards
Language
English
Pages
46

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Subjects
Electron spectroscopy, Semiconductors, Testing, Sputtering (Physics), Auger electron spectroscopy

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Cover of: The Capabilities and limitations of auger sputter profiling for studies of semiconductors
The Capabilities and limitations of auger sputter profiling for studies of semiconductors
1981, U.S. Dept. of Commerce, National Bureau of Standards
in English
  • Not in Library

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Book Details

Edition Notes

Includes bibliographical references.
"Issued September 1981."
Item 247 (microfiche)

Published in
Washington, D.C
Series
NBS special publication :, 400-67, Semiconductor measurement technology

Classifications

Dewey Decimal Class
602/.18 s, 537.6/22/0287
Library of Congress
QC100 .U57 no. 400-67, TK7871.85 .U57 no. 400-67

The Physical Object

Pagination
vi, 46 p. :
Number of pages
46

ID Numbers

Open Library
OL3919155M
LCCN
81600003

Source records

Scriblio MARC record
Library of Congress MARC record
Library of Congress MARC record

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February 12, 2019 Edited by MARC Bot import existing book
February 5, 2019 Created by MARC Bot import existing book