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July 29, 2014 | History

Reactive Sputter Deposition 1 edition

Reactive Sputter Deposition
D. Depla

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Reactive Sputter Deposition
edited by Diederik Depla, Stijn Mahieu

Published 2008 by Springer-Verlag Berlin Heidelberg in Berlin, Heidelberg .
Written in English.

Edition Notes

Series
Springer Series in Materials Science -- 109

The Physical Object

Format
[electronic resource] /

ID Numbers

Open Library
OL25564502M
Internet Archive
reactivesputterd00depl
ISBN 13
9783540766629, 9783540766643

History Created July 29, 2014 · 1 revision Download catalog record: RDF / JSON

July 29, 2014 Created by ImportBot import new book