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An edition of Design and Manufacturing of Active Microsystems (2011)

Design and Manufacturing of Active Microsystems

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Cover of: Design and Manufacturing of Active Microsystems by Stephanus Büttgenbach, Stephanus Büttgenbach
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Last edited by MARC Bot
August 15, 2024 | History
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An edition of Design and Manufacturing of Active Microsystems (2011)

Design and Manufacturing of Active Microsystems

by

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Publish Date
Publisher
Springer-Verlag Berlin Heidelberg
Language
English

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Subjects

Engineering Structural control (Engineering) Nanotechnology Microelectromechanical systems Microelectronics Materials Treatment Operating Procedures Mechatronics Nanotechnology and Microengineering
Edition Availability
Cover of: Design and Manufacturing of Active Microsystems
Design and Manufacturing of Active Microsystems
Apr 19, 2013, Springer
paperback
Cover of: Design and Manufacturing of Active Microsystems
Design and Manufacturing of Active Microsystems
2011, Springer-Verlag Berlin Heidelberg
electronic resource / in English
Cover of: Design and Manufacturing of Active Microsystems
Design and Manufacturing of Active Microsystems
Apr 10, 2011, Springer
paperback

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Book Details

Edition Notes

Published in
Berlin, Heidelberg
Series
Microtechnology and MEMS

Classifications

Library of Congress
TK7874 .D4744 2011, T174.7TJ163.12TS1-23, TK7875

The Physical Object

Format
[electronic resource] /

Edition Identifiers

Open Library
OL25564453M
ISBN 13
9783642129025, 9783642129032
LCCN
2011923525
OCLC/WorldCat
753583386

Work Identifiers

Work ID
OL16981248W

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