{"subjects": ["Engineering", "Structural control (Engineering)", "Nanotechnology", "Microelectromechanical systems", "Microelectronics", "Materials Treatment Operating Procedures", "Mechatronics", "Nanotechnology and Microengineering"], "key": "/works/OL16981248W", "title": "Design and Manufacturing of Active Microsystems", "authors": [{"type": {"key": "/type/author_role"}, "author": {"key": "/authors/OL4035605A"}}], "type": {"key": "/type/work"}, "covers": [10266202], "latest_revision": 3, "revision": 3, "created": {"type": "/type/datetime", "value": "2014-07-29T23:56:48.470414"}, "last_modified": {"type": "/type/datetime", "value": "2024-08-15T14:25:00.589286"}}