An edition of Proceedings of the Workshop on Metals, Dielectrics, and Interfaces for VLSI VI, 9-12 May 1988, St. Francis Retreat Center, San Juan Bautista, California (1988)

Proceedings of the Workshop on Metals, Dielectrics, and Interfaces for VLSI VI, 9-12 May 1988, St. Francis Retreat Center, San Juan Bautista, California

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An edition of Proceedings of the Workshop on Metals, Dielectrics, and Interfaces for VLSI VI, 9-12 May 1988, St. Francis Retreat Center, San Juan Bautista, California (1988)

Proceedings of the Workshop on Metals, Dielectrics, and Interfaces for VLSI VI, 9-12 May 1988, St. Francis Retreat Center, San Juan Bautista, California

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
American Institute of Physics for the American Vacuum Society
Language
English
Pages
1795

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Cover of: Proceedings of the Workshop on Metals, Dielectrics, and Interfaces for VLSI VI, 9-12 May 1988, St. Francis Retreat Center, San Juan Bautista, California
Proceedings of the Workshop on Metals, Dielectrics, and Interfaces for VLSI VI, 9-12 May 1988, St. Francis Retreat Center, San Juan Bautista, California
1988, American Institute of Physics for the American Vacuum Society
in English
  • Not in Library

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Book Details

Edition Notes

Published in
New York
Series
Journal of vacuum science & technology B -- vol. 6, no. 6

The Physical Object

Pagination
p.1707-1795 :
Number of pages
1795

ID Numbers

Open Library
OL22653174M

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