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January 29, 2010 | History

Proceedings of the Workshop on Metals, Dielectrics, and Interfaces for VLSI VI, 9-12 May 1988, St. Francis Retreat Center, San Juan Bautista, California 1 edition

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Proceedings of the Workshop on Metals, Dielectrics, and Interfaces for VLSI VI, 9-12 May 1988, St. Francis Retreat Center, San Juan Bautista, California
sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley and the American Vacuum Society ; Special editor ... Michael D. Strathman.

Published 1988 by American Institute of Physics for the American Vacuum Society in New York .
Written in English.

Edition Notes

Series
Journal of vacuum science & technology B -- vol. 6, no. 6

The Physical Object

Pagination
p.1707-1795 :
Number of pages
1795

ID Numbers

Open Library
OL22653174M

History Created December 11, 2009 · 2 revisions Download catalog record: RDF / JSON

January 29, 2010 Edited by WorkBot add more information to works
December 11, 2009 Created by WorkBot add works page