An edition of Rapid thermal processing for future semiconductor devices (2003)

Rapid thermal processing for future semiconductor devices

proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), held at Ise-Shima, Mie, Japan, November 14-16, 2001

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Last edited by WorkBot
January 29, 2010 | History
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An edition of Rapid thermal processing for future semiconductor devices (2003)

Rapid thermal processing for future semiconductor devices

proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), held at Ise-Shima, Mie, Japan, November 14-16, 2001

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Elsevier
Language
English
Pages
150

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Previews available in: English

Subjects
Rapid thermal processing, Congresses

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Cover of: Rapid thermal processing for future semiconductor devices
Rapid thermal processing for future semiconductor devices: proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), held at Ise-Shima, Mie, Japan, November 14-16, 2001
2003, Elsevier
in English
  • Not in Library
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Book Details

Edition Notes

Includes bibliographical references.

Published in
Amsterdam, Boston, London
Genre
Congresses.

Classifications

Dewey Decimal Class
621.38152
Library of Congress
TK7871.85 .I58 2001

The Physical Object

Pagination
x, 150 p. :
Number of pages
150

ID Numbers

Open Library
OL22563204M
Internet Archive
rapidthermalproc00fuku
ISBN 10
0444513396

Source records

Internet Archive item record
Internet Archive item record

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January 29, 2010 Edited by WorkBot add more information to works
December 11, 2009 Created by WorkBot add works page