An edition of Ion implantation technology (2006)

Ion implantation technology

16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006

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Cover of: Ion implantation technology by International Conference on Ion Implantation Technology (16th 2006 Marseille, France)
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Last edited by MARC Bot
December 28, 2022 | History
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An edition of Ion implantation technology (2006)

Ion implantation technology

16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006

by

  • 0 Ratings
  • 1 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
American Institute of Physics
Language
English
Pages
664

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Subjects
Congresses, Semiconductor doping, Semiconductors, Ion implantation

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Edition Availability
Cover of: Ion implantation technology
Ion implantation technology: 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006
2006, American Institute of Physics
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Table of Contents

Doping processes in semiconductors
Cluster implantation in doping
PIII and plasma doping
Materials : novel techniques and applications
Implant technology
Implant technology (materials)
Process control & yield
Process control & yield (metrology)
Materials.

Edition Notes

Includes bibliographical references and index.

Published in
Melville, N.Y
Series
AIP conference proceedings -- v. 866, AIP conference proceedings -- no. 866.
Genre
Congresses.
Other Titles
IIT 2006

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
QC702.7.I55 I577 2006

The Physical Object

Pagination
xvii, 664 p. :
Number of pages
664

ID Numbers

Open Library
OL18524595M
ISBN 10
0735403651
ISBN 13
9780735403659
LCCN
2006935319
OCLC/WorldCat
77535657
Goodreads
3249099

Source records

Library of Congress MARC record
marc_columbia MARC record

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History

Download catalog record: RDF / JSON
December 28, 2022 Edited by MARC Bot import existing book
April 10, 2020 Edited by Michel T. Talbot Added new cover
January 23, 2010 Edited by WorkBot add more information to works
December 11, 2009 Created by WorkBot add works page