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Proceedings of ISSM2000: the Ninth [IEEE] International Symposium on Semiconductor Manufacturing : September 26-28, 2000, Hotel East 21 Tokyo, Tokyo, Japan
2000, IEEE, Ultra Clean Society
in English
0780373928 9780780373921
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Book Details
Edition Notes
"IEEE CATALOG NUMBER: 00CH37130"--verso of T.p.
Includes bibliographic references.
English with some material in Japanese.
The Physical Object
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Feedback?April 28, 2010 | Edited by Open Library Bot | Linked existing covers to the work. |
January 23, 2010 | Edited by WorkBot | add more information to works |
December 11, 2009 | Created by WorkBot | add works page |