Smart sensors, actuators, and MEMS II

9-11 May 2005, Seville, Spain

Smart sensors, actuators, and MEMS II
Jung-Chih Chiao, Carles Cané, ...
Smart sensors, actuators, and MEMS II by Jung-Chih Chiao, Carles Cané, Jung-Chih Chiao, Carles Cané
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Smart sensors, actuators, and MEMS II

9-11 May 2005, Seville, Spain

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Publish Date
Publisher
SPIE
Language
English
Pages
730

Book Details


Edition Notes

Includes bibliographical references and author index.

Published in
Bellingham, Wash
Series
Proceedings of SPIE proceedings series -- v. 5836, Proceedings of SPIE--the International Society for Optical Engineering -- v. 5836.

Classifications

Dewey Decimal Class
621
Library of Congress
TK7875 .S6353 2005, TK7875.S6353 2005

The Physical Object

Pagination
xv, 730 p.
Number of pages
730

Edition Identifiers

Open Library
OL31690467M
ISBN 10
0819458317
LCCN
2006273198
OCLC/WorldCat
61295148

Work Identifiers

Work ID
OL23990550W

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{{cite book|author1=Jung-Chih Chiao |author2=Carles Cané |date=2005 |title=Smart sensors, actuators, and MEMS II |publication-place=Bellingham, Wash |publisher=SPIE |isbn=0-8194-5831-7 |lccn=2006273198 |oclc=61295148 |ol=31690467M}}