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Smart sensors, actuators, and MEMS II: 9-11 May 2005, Seville, Spain
2005, SPIE
in English
0819458317 9780819458315
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Includes bibliographical references and author index.
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{{cite book|author1=Jung-Chih Chiao |author2=Carles Cané |date=2005 |title=Smart sensors, actuators, and MEMS II |publication-place=Bellingham, Wash |publisher=SPIE |isbn=0-8194-5831-7 |lccn=2006273198 |oclc=61295148 |ol=31690467M}}