| Record ID | marc_loc_2016/BooksAll.2016.part33.utf8:161084751:1634 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part33.utf8:161084751:1634?format=raw |
LEADER: 01634cam a22003617a 4500
001 2006273198
003 DLC
005 20060809102601.0
008 060322s2005 waua b 101 0 eng d
010 $a 2006273198
020 $a0819458317 (pbk.)
035 $a(OCoLC)ocm61295148
040 $aLHL$cLHL$dBAKER$dIXA$dDLC
042 $alccopycat
050 00 $aTK7875$b.S6353 2005
082 00 $a621$222
245 00 $aSmart sensors, actuators, and MEMS II :$b9-11 May 2005, Seville, Spain /$cCarles Cané, Jung-Chih Chiao, Fernando Vidal Verdú, chairs/editors ; sponsored by, SPIE Europe, ; cosponsored by, AnaFocus (Spain) ... [et al.] ; cooperating organizations, CNM--Centro Nacional de Microelectrónica (Spain) ... [et al.] ; published by SPIE--the International Society for Optical Engineering.
260 $aBellingham, Wash. :$bSPIE,$cc2005.
300 $axv, 730 p. :$bill. ;$c28 cm.
490 1 $aProceedings of SPIE proceedings series ;$vv. 5836
504 $aIncludes bibliographical references and author index.
650 0 $aMicroelectromechanical systems$vCongresses.
650 0 $aMicrotechnology$vCongresses.
650 0 $aActuators$xIndustrial applications$vCongresses.
650 0 $aDetectors$xIndustrial applications$vCongresses.
650 0 $aScanning systems$vCongresses.
700 1 $aChiao, Jung-Chih.
700 1 $aCané, Carles.
710 2 $aSPIE Europe.
710 2 $aAnaFocus.
710 2 $aCentro Nacional de Microlectrónica.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 5836.