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An edition of Rapid thermal processing of semiconductors (1997)

Rapid thermal processing of semiconductors

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Cover of: Rapid thermal processing of semiconductors by V. E. Borisenko, V. E. Borisenko
Rapid thermal processing of semiconductors by V. E. Borisenko, V. E. Borisenko
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Last edited by MARC Bot
August 7, 2024 | History
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An edition of Rapid thermal processing of semiconductors (1997)

Rapid thermal processing of semiconductors

by

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Publish Date
Publisher
Plenum Press
Language
English
Pages
358

Previews available in: English

Subjects

Semiconductors Rapid thermal processing Design and construction
Edition Availability
Cover of: Rapid thermal processing of semiconductors
Rapid thermal processing of semiconductors
1997, Plenum Press
in English
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Book Details

Edition Notes

Includes bibliographical references (p. 301-353) and index.

Published in
New York
Series
Microdevices, The language of science

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7871.85 .B64 1997, TA401-492

The Physical Object

Pagination
xxii, 358 p. :
Number of pages
358

Edition Identifiers

Open Library
OL658573M
ISBN 10
0306450542
LCCN
97003783
OCLC/WorldCat
36327442
Goodreads
3950544

Work Identifiers

Work ID
OL2628568W

Source records

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{{cite book|author=V. E. Borisenko |date=1997 |title=Rapid thermal processing of semiconductors |url=https://archive.org/details/rapidthermalproc0000bori |publication-place=New York |publisher=Plenum Press |isbn=0-306-45054-2 |lccn=97003783 |oclc=36327442 |ol=658573M}}