{"notes": {"type": "/type/text", "value": "Includes bibliographical references (p. 301-353) and index."}, "identifiers": {"goodreads": ["3950544"]}, "title": "Rapid thermal processing of semiconductors", "authors": [{"key": "/authors/OL382960A"}], "publish_date": "1997", "publishers": ["Plenum Press"], "isbn_10": ["0306450542"], "series": ["Microdevices", "The language of science"], "covers": [1163435], "lc_classifications": ["TK7871.85 .B64 1997", "TA401-492"], "publish_places": ["New York"], "contributions": ["Hesketh, P. J."], "pagination": "xxii, 358 p. :", "source_records": ["marc:marc_records_scriblio_net/part26.dat:114530769:843", "marc:marc_loc_updates/v36.i10.records.utf8:8351473:1047", "marc:marc_loc_2016/BooksAll.2016.part26.utf8:37403725:1047", "bwb:9780306450549", "ia:rapidthermalproc0000bori", "promise:bwb_daily_pallets_2021-10-06", "marc:marc_columbia/Columbia-extract-20221130-004.mrc:637004307:1978"], "dewey_decimal_class": ["621.3815/2"], "languages": [{"key": "/languages/eng"}], "lccn": ["97003783"], "subjects": ["Semiconductors -- Design and construction", "Rapid thermal processing"], "publish_country": "nyu", "by_statement": "Victor E. Borisenko, Peter J. Hesketh.", "type": {"key": "/type/edition"}, "ocaid": "rapidthermalproc0000bori", "key": "/books/OL658573M", "number_of_pages": 358, "works": [{"key": "/works/OL2628568W"}], "local_id": ["urn:bwbsku:W3-DQY-023"], "oclc_numbers": ["36327442"], "latest_revision": 10, "revision": 10, "created": {"type": "/type/datetime", "value": "2008-04-01T03:28:50.625462"}, "last_modified": {"type": "/type/datetime", "value": "2024-08-07T08:26:01.806426"}}