Silicon nitride and silicon dioxide thin insulating films

proceedings of the fifth international symposium

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Last edited by MARC Bot
December 1, 2020 | History

Silicon nitride and silicon dioxide thin insulating films

proceedings of the fifth international symposium

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Publish Date
Language
English
Pages
284

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Book Details


Edition Notes

Includes bibliographical references and indexes.
"This proceedings volume contains the papers presented at the symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films held May 2-7, 1999 in Seattle, Washington, USA" -- preface.

Published in
Pennington, NJ (10 S. Main St., Pennington 08534-2696
Series
Proceedings / Electrochemical Society ;, v. 99-6, Proceedings (Electrochemical Society) ;, v. 99-6.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7872.T55 S94 1999

The Physical Object

Pagination
xi, 284 p. :
Number of pages
284

Edition Identifiers

Open Library
OL54847M
ISBN 10
1566772281
LCCN
99066175
Goodreads
3502299

Work Identifiers

Work ID
OL518123W

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
December 1, 2020 Edited by MARC Bot import existing book
April 14, 2010 Edited by Open Library Bot Linked existing covers to the edition.
April 1, 2010 Edited by bgimpertBot Added goodreads ID.
December 8, 2009 Edited by ImportBot link works
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record