Phenomenology of silicon wafer bonding

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Phenomenology of silicon wafer bonding
Karin Ljungberg
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Last edited by MARC Bot
November 29, 2023 | History

Phenomenology of silicon wafer bonding

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Publish Date
Language
English
Pages
59

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Edition Availability
Cover of: Phenomenology of silicon wafer bonding
Phenomenology of silicon wafer bonding
1995, Acta Universitatis Upsaliensis
in English

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Book Details


Edition Notes

Thesis (doctoral)--Universitas Upsaliensis, 1995.

Includes bibliographical references (p. 53-59)

Published in
Uppsala
Series
Acta Universitatis Upsaliensis -- 166

The Physical Object

Pagination
59 p.
Number of pages
59

ID Numbers

Open Library
OL50074602M
ISBN 10
9155436331
ISBN 13
9789155436339
OCLC/WorldCat
37835537

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Download catalog record: RDF / JSON / OPDS | Wikipedia citation
November 29, 2023 Created by MARC Bot Imported from harvard_bibliographic_metadata record