An edition of Resolution enhancement techniques in optical lithography (2001)

Resolution Enhancement Techniques in Optical Lithography

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Resolution Enhancement Techniques in Optical ...
Alfred Kwok-Kit Wong, Alfred K ...
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Last edited by ImportBot
February 17, 2023 | History
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An edition of Resolution enhancement techniques in optical lithography (2001)

Resolution Enhancement Techniques in Optical Lithography

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Publish Date
Publisher
SPIE
Language
English

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Previews available in: English

Subjects

Design and construcition, Integrated circuits, Microlithography, Design and construction
Edition Availability
Cover of: Resolution enhancement techniques in optical lithography
Resolution enhancement techniques in optical lithography
2001, SPIE Optical Engineering Press, SPIE Publications, Brand: SPIE Publications, SPIE Press
in English
Cover of: Resolution Enhancement Techniques in Optical Lithography
Resolution Enhancement Techniques in Optical Lithography
2001, SPIE
in English

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Book Details

Classifications

Library of Congress
TK7874

The Physical Object

Pagination
134

Edition Identifiers

Open Library
OL46602469M
ISBN 13
9780819478818

Work Identifiers

Work ID
OL12226319W

Source records

Better World Books record

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February 17, 2023 Created by ImportBot Imported from Better World Books record