An edition of MEMS/NEMS (2006)

MEMS/NEMS

handbook techniques and applications

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MEMS/NEMS
Cornelius T. Leondes
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Last edited by MARC Bot
December 25, 2022 | History
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An edition of MEMS/NEMS (2006)

MEMS/NEMS

handbook techniques and applications

by

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  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Springer
Language
English

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Subjects
Microelectromechanical systems, Design and construction, Nanotechnology

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Edition Availability
Cover of: MEMS/NEMS
MEMS/NEMS: handbook techniques and applications
2006, Springer
in English
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Book Details

Table of Contents

v. 1. Design methods
v. 2. Fabrication techniques
v. 3. Manufacturing methods
v. 4. Sensors and actuators
v. 5. Medical applications and MOEMS.

Edition Notes

Includes bibliographical references and index.

Electronic reproduction. Norwich, N.Y. : Knovel, 2007. System requirements: Adobe Acrobat Reader. Available via the World Wide Web. Access restricted to users at licensed institutions.

Published in
New York
Other Titles
MEMS/NEMS handbook
Copyright Date
2006

Classifications

Dewey Decimal Class
620/.5
Library of Congress
TK153 .M446 2006eb

The Physical Object

Pagination
5 volumes

ID Numbers

Open Library
OL44916432M
ISBN 10
1601194560
ISBN 13
9781601194565
OCLC/WorldCat
262690838

Source records

marc_columbia MARC record

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December 25, 2022 Created by MARC Bot Imported from marc_columbia MARC record