An edition of Plasma processing (1981)

Plasma processing

proceedings of the Symposium on Plasma Etching and Deposition

by

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Plasma processing
Symposium on Plasma Etching an ...
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Last edited by MARC Bot
October 21, 2020 | History
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An edition of Plasma processing (1981)

Plasma processing

proceedings of the Symposium on Plasma Etching and Deposition

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Electrochemical Society
Language
English
Pages
336

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Subjects
Congresses, Etching, Plasma etching, Semiconductors

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Edition Availability
Cover of: Plasma processing
Plasma processing: proceedings of the Symposium on Plasma Etching and Deposition
1981, Electrochemical Society
in English
  • Not in Library

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Book Details

Edition Notes

Includes bibliographical references and indexes.

Published in
Pennington, NJ (10 South Main St., Pennington 08534)
Series
Proceedings / Electrochemical Society ;, v. 81-1, Proceedings (Electrochemical Society) ;, v. 81-1.

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7871.85 .S973 1980

The Physical Object

Pagination
x, 336 p. :
Number of pages
336

ID Numbers

Open Library
OL3788125M
LCCN
81065237

Source records

Library of Congress MARC record

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History

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October 21, 2020 Edited by MARC Bot import existing book
December 14, 2009 Edited by WorkBot link works
December 14, 2009 Edited by WorkBot link works
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record