Device and process technologies for MEMS and microelectronics II

17-19 December, 2001, Adelaide, Australia

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Last edited by MARC Bot
November 14, 2023 | History

Device and process technologies for MEMS and microelectronics II

17-19 December, 2001, Adelaide, Australia

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
538

Buy this book

Previews available in: English

Book Details


Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash
Series
SPIE proceedings series ;, v. 4592, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 4592.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.381
Library of Congress
TK7875 .D48 2001

The Physical Object

Pagination
xi, 538 p. :
Number of pages
538

ID Numbers

Open Library
OL3582956M
Internet Archive
deviceprocesstec4592unse
ISBN 10
0819443220
LCCN
2002280119
OCLC/WorldCat
49052655

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
November 14, 2023 Edited by MARC Bot import existing book
June 19, 2023 Edited by ImportBot import existing book
December 5, 2020 Edited by MARC Bot import existing book
February 18, 2019 Edited by MARC Bot import existing book
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record