| Record ID | ia:deviceprocesstec4592unse |
| Source | Internet Archive |
| Download MARC XML | https://archive.org/download/deviceprocesstec4592unse/deviceprocesstec4592unse_marc.xml |
| Download MARC binary | https://www.archive.org/download/deviceprocesstec4592unse/deviceprocesstec4592unse_meta.mrc |
LEADER: 01624cam a22003257a 4500
001 2002280119
003 DLC
005 20050526082637.0
008 020409s2001 waua b 101 0 eng d
010 $a 2002280119
020 $a0819443220
035 $a(OCoLC)ocm49052655
040 $aLHL$cLHL$dBUF$dDLC
042 $alccopycat
050 00 $aTK7875$b.D48 2001
082 00 $a621.381$222
245 00 $aDevice and process technologies for MEMS and microelectronics II :$b17-19 December, 2001, Adelaide, Australia /$cJung-Chih Chiao, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section.
260 $aBellingham, Wash. :$bSPIE,$cc2001.
300 $axi, 538 p. :$bill. ;$c28 cm.
490 1 $aSPIE proceedings series ;$vv. 4592
504 $aIncludes bibliographical references and index.
650 0 $aMicroelectromechanical systems$vCongresses.
650 0 $aPhoton detectors$xDesign and construction$vCongresses.
650 0 $aPhotomechanical processes$vCongresses.
650 0 $aPhotolithography$vCongresses.
700 1 $aChiao, Jung-Chih.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
710 1 $aUnited States.$bAir Force.$bAsian Office of Aerospace Research and Development.
710 2 $aInstitute of Electrical and Electronics Engineers.$bSouth Australia Section.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 4592.