An edition of X-ray lithography and applications of soft x-rays to technology
(1983)
X-ray lithography and applications of soft x-rays to technology
October 19-20, 1983, Upton, New York
by Alan D. Wilson
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Subjects
Congresses, X-rays, Industrial applications, X-ray lithography| Edition | Availability |
|---|---|
1
X-ray lithography and applications of soft x-rays to technology
1984, SPIE--The International Society for Optical Engineering, SPIE
in English
0892524839 9780892524839
|
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2
X-ray lithography and applications of soft x-rays to technology: October 19-20, 1983, Upton, New York
1983, SPIE
in English
0892524839 9780892524839
|
aaaa
|
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Includes bibliographies and index.
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- Created April 1, 2008
- 3 revisions
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| July 30, 2019 | Edited by MARC Bot | associate edition with work OL19444308W |
| April 16, 2010 | Edited by bgimpertBot | Added goodreads ID. |
| April 1, 2008 | Created by an anonymous user | Imported from Scriblio MARC record |