An edition of Optical Microlithography XXVII
(2014)
Optical Microlithography XXVII
25-27 February 2014
by Kafai Lai, Andreas Erdmann, and SPIE
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Last edited by Tom Morris
January 17, 2023 | History
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- Created August 4, 2020
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| January 17, 2023 | Edited by Tom Morris | merge authors |
| November 14, 2020 | Edited by MARC Bot | import existing book |
| August 4, 2020 | Created by ImportBot | Imported from Better World Books record |