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"Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics, including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations"--
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Previews available in: English
Edition | Availability |
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Physics of radio-frequency plasmas
2011, Cambridge University Press
in English
0521763002 9780521763004
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Book Details
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Includes bibliographical references (pages 375-382) and index.
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- Created February 22, 2012
- 11 revisions
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December 23, 2022 | Edited by MARC Bot | import existing book |
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February 22, 2012 | Created by LC Bot | Imported from Library of Congress MARC record |