Atomic layer deposition applications 3

Atomic layer deposition applications 3
Symposium on Atomic Layer Depo ...
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Last edited by WorkBot
December 15, 2009 | History

Atomic layer deposition applications 3

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Publish Date
Language
English
Pages
288

Buy this book

Edition Availability
Cover of: Atomic layer deposition applications 3
Atomic layer deposition applications 3
2007, Electrochemical Society
in English
Cover of: Atomic layer deposition applications 3
Atomic layer deposition applications 3
2007, Electrochemical Society
in English
Cover of: Atomic layer deposition applications 3
Atomic layer deposition applications 3
2007, Electrochemical Society
in English
Cover of: Atomic layer deposition applications 3
Atomic layer deposition applications 3
2007, Electrochemical Society
in English

Add another edition?

Book Details


Edition Notes

"Third Symposium on Atomic Layer Deposition Applications was held on October 8 and 9, 2007 in the Hilton Washington, Washington, DC as part of the 212th meeting of the Electrochemical Society"--P. iii.

"Dielectric and semiconductor materials, devices, and processing"--Cover.

Includes bibliographical references and index.

Published in
Pennington, NJ
Series
ECS transactions -- vol. 11, no.7
Genre
Congresses

Classifications

Dewey Decimal Class
621.38152
Library of Congress
TS695 .S96 2007

The Physical Object

Pagination
viii, 288 p. :
Number of pages
288

Edition Identifiers

Open Library
OL23641644M
ISBN 13
9781566775731
LCCN
2008276631

Work Identifiers

Work ID
OL13838761W

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December 15, 2009 Edited by WorkBot link works
August 5, 2009 Created by ImportBot Imported from Library of Congress MARC record