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Edition | Availability |
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1
Atomic layer deposition applications 3
2007, Electrochemical Society
in English
1566775736 9781566775731
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2
Atomic layer deposition applications 3
2007, Electrochemical Society
in English
1566775736 9781566775731
|
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|
3
Atomic layer deposition applications 3
2007, Electrochemical Society
in English
1566775736 9781566775731
|
zzzz
|
4
Atomic layer deposition applications 3
2007, Electrochemical Society
in English
1566775736 9781566775731
|
zzzz
|
Book Details
Edition Notes
"Third Symposium on Atomic Layer Deposition Applications was held on October 8 and 9, 2007 in the Hilton Washington, Washington, DC as part of the 212th meeting of the Electrochemical Society"--P. iii.
"Dielectric and semiconductor materials, devices, and processing"--Cover.
Includes bibliographical references and index.
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- Created August 5, 2009
- 2 revisions
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August 5, 2009 | Created by ImportBot | Imported from Library of Congress MARC record |