An edition of ULSI process integration 5
(2007)
ULSI process integration 5
by International Symposium on ULSI Process ...
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Edition Notes
"Presented at the Fifth Symposium on ULSI Process Integration held in Washington, DC at the 212th Meeting of the Electrochemical Society, October 7-12, 2007"--P. iii.
"Dielectric and semiconductor materials, devices, and processing"--Cover.
Sponsoring Division: Electronics and Photonics.
Includes bibliographical references and index.
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- Created July 29, 2009
- 3 revisions
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| December 20, 2020 | Edited by MARC Bot | import existing book |
| December 15, 2009 | Edited by WorkBot | link works |
| July 29, 2009 | Created by ImportBot | Imported from Library of Congress MARC record |