An edition of Integrated Circuit Metrology Inspection and Process Control Viii/V 2196 (1994)

Integrated circuit metrology, inspection, and process control VIII

28 February-2 March, San Jose, California

by

Cover of: Integrated circuit metrology, inspection, and process control VIII by Mary Bennett
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Last edited by MARC Bot
July 31, 2019 | History
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An edition of Integrated Circuit Metrology Inspection and Process Control Viii/V 2196 (1994)

Integrated circuit metrology, inspection, and process control VIII

28 February-2 March, San Jose, California

by

This edition doesn't have a description yet. Can you add one?

Publish Date
Publisher
SPIE
Language
English
Pages
553

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Buy this book

Subjects

Congresses, Measurement, Optical measurements, Process control, Inspection, Integrated circuits

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Edition Availability
Cover of: Integrated circuit metrology, inspection, and process control VIII
Integrated circuit metrology, inspection, and process control VIII: 28 February-2 March, San Jose, California
1994, SPIE
in English
Libraries near you: WorldCat
Cover of: Integrated Circuit Metrology Inspection and Process Control Viii/V 2196
Integrated Circuit Metrology Inspection and Process Control Viii/V 2196
May 1994, Society of Photo Optical
Paperback in English
Libraries near you: WorldCat
Cover of: Integrated circuit metrology, inspection, and process control VIII
Integrated circuit metrology, inspection, and process control VIII: 28 February-2 March, San Jose, California
1994, SPIE
in English
  • Not in Library
Libraries near you: WorldCat

Add another edition?

Book Details

Edition Notes

"Papers in this conference ... were presented at the SPIE Microlithography Symposium"--P. ix.

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
Proceedings / SPIE--the International Society for Optical Engineering -- v. 2196, Proceedings of SPIE--the International Society for Optical Engineering -- v. 2196.

Classifications

Library of Congress
TK7874 .I516 1994

The Physical Object

Pagination
ix, 553 p. :
Number of pages
553

ID Numbers

Open Library
OL21530534M
ISBN 10
0819414913

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 31, 2019 Edited by MARC Bot associate edition with work OL8554365W
April 13, 2010 Edited by Open Library Bot Linked existing covers to the edition.
November 2, 2008 Created by ImportBot Imported from University of Toronto MARC record