An edition of Integrated Circuit Metrology Inspection and Process Control Viii/V 2196 (1994)

Integrated circuit metrology, inspection, and process control VIII

28 February-2 March, San Jose, California

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Cover of: Integrated circuit metrology, inspection, and process control VIII by Marylyn Hoy Bennett, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International.
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Last edited by MARC Bot
July 31, 2019 | History
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An edition of Integrated Circuit Metrology Inspection and Process Control Viii/V 2196 (1994)

Integrated circuit metrology, inspection, and process control VIII

28 February-2 March, San Jose, California

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
553

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Subjects
Congresses, Measurement, Optical measurements, Process control, Inspection, Integrated circuits

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Edition Availability
Cover of: Integrated circuit metrology, inspection, and process control VIII
Integrated circuit metrology, inspection, and process control VIII: 28 February-2 March, San Jose, California
1994, SPIE
in English
Libraries near you: WorldCat
Cover of: Integrated circuit metrology, inspection, and process control VIII
Integrated circuit metrology, inspection, and process control VIII: 28 February-2 March, San Jose, California
1994, SPIE
in English
  • Not in Library
Libraries near you: WorldCat
Cover of: Integrated Circuit Metrology Inspection and Process Control Viii/V 2196
Integrated Circuit Metrology Inspection and Process Control Viii/V 2196
May 1994, Society of Photo Optical
Paperback in English
Libraries near you: WorldCat

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Book Details

Edition Notes

"Papers in this conference ... were presented at the SPIE Microlithography Symposium"--P. ix.

Includes bibliographical references and author index.

Published in
Bellingham, Wash., USA
Series
Proceedings / SPIE--the International Society for Optical Engineering -- v. 2196., Proceedings of SPIE--the International Society for Optical Engineering -- v. 2196.
Genre
Congresses.

The Physical Object

Pagination
ix, 553 p. :
Number of pages
553

ID Numbers

Open Library
OL19567704M
ISBN 10
0819414913
ISBN 13
9780819414915
LCCN
94065791
OCLC/WorldCat
30416514

Source records

Oregon Libraries MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 31, 2019 Edited by MARC Bot associate edition with work OL8554365W
April 13, 2010 Edited by Open Library Bot Linked existing covers to the edition.
April 25, 2009 Edited by ImportBot add OCLC number
October 22, 2008 Created by ImportBot Imported from Oregon Libraries MARC record