OSA proceedings on soft-x-ray projection lithography

proceedings of the Topical Meeting, April 10-12, 1991, Monterey, California

OSA proceedings on soft-x-ray projection lith ...
Jeffrey Bokor
Locate

My Reading Lists:

Create a new list



Buy this book

Last edited by MARC Bot
July 31, 2019 | History

OSA proceedings on soft-x-ray projection lithography

proceedings of the Topical Meeting, April 10-12, 1991, Monterey, California

This edition doesn't have a description yet. Can you add one?

Publish Date
Language
English
Pages
152

Buy this book

Edition Availability
Cover of: Soft X-Ray Projection Lithography (Proceedings Series, Vol 12)
Soft X-Ray Projection Lithography (Proceedings Series, Vol 12)
November 1991, Optical Society of America
Hardcover in English
Cover of: OSA proceedings on soft-x-ray projection lithography

Add another edition?

Book Details


Edition Notes

Proceedings of the Topical Meeting on Soft-X-Ray Projection Lithography.

Includes bibliographical references.

Published in
Washington, D.C
Series
OSA proceedings -- vol. 12, OSA proceeding series -- v. 12.
Other Titles
Soft-X-Ray Projection Lithography.

Classifications

Library of Congress
TA7874 .O75 1991

The Physical Object

Pagination
xi, 152 p. :
Number of pages
152

Edition Identifiers

Open Library
OL20908376M
ISBN 10
1557521875

Work Identifiers

Work ID
OL9829854W

Community Reviews (0)

No community reviews have been submitted for this work.

Lists

History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 31, 2019 Edited by MARC Bot associate edition with work OL9829854W
October 30, 2008 Created by ImportBot Imported from University of Toronto MARC record