An edition of Plasma etching processes for sub-quarter micron devices (2000)

Plasma etching processes for sub-quarter micron devices

proceedings of the International Symposium

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read
Cover of: Plasma etching processes for sub-quarter micron devices by editor, G.S. Mathad ... [et al.] ; Dielectric Science and Technology and Electronics Divisions [of the Electrochemical Society].
Not in Library

My Reading Lists:

Create a new list

Check-In

×Close
Add an optional check-in date. Check-in dates are used to track yearly reading goals.
Today
Notes
  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read
Notes

Check nearby libraries

Buy this book

Last edited by MARC Bot
July 20, 2024 | History
Edit
An edition of Plasma etching processes for sub-quarter micron devices (2000)

Plasma etching processes for sub-quarter micron devices

proceedings of the International Symposium

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

This edition doesn't have a description yet. Can you add one?

Publish Date
Publisher
Electrochemical Society.
Language
English
Pages
378

Check nearby libraries

Buy this book

Subjects
Semiconductors, Congresses, Etching, Plasma etching, Sputtering (Physics), Integrated circuits, Design and construction, Semiconductor wafers

Showing 1 featured edition. View all 1 editions?

Edition Availability
Cover of: Plasma etching processes for sub-quarter micron devices
Plasma etching processes for sub-quarter micron devices: proceedings of the International Symposium
2000, Electrochemical Society.
in English
  • Not in Library
Libraries near you: WorldCat

Add another edition?

Book Details

Edition Notes

"This proceedings volume contains the papers presented at the symposium on Plasma Etching Processes for Sub-Quarter Micron Devices. The symposium ... was held in Honolulu, HI, October 17-22, 1999 ..."--Preface.

Includes bibliographic references and indexes.

Published in
Pennington, New Jersey
Series
Proceedings -- v. 99-30, Proceedings (Electrochemical Society) -- 99-30.
Genre
Congresses.

Classifications

Library of Congress
TA2020 .P515 1999, TA2020 .P52 2000

The Physical Object

Pagination
x, 378 p. :
Number of pages
378

ID Numbers

Open Library
OL19540264M
ISBN 10
1566772532
LCCN
00101648
OCLC/WorldCat
44074969

Source records

University of Toronto MARC record
Library of Congress MARC record
marc_columbia MARC record

Community Reviews (0)

Feedback?
No community reviews have been submitted for this work.

Lists

This work does not appear on any lists.

History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 20, 2024 Edited by MARC Bot import existing book
August 3, 2020 Edited by MARC Bot add LCCN
July 29, 2020 Edited by MARC Bot import existing book
February 17, 2019 Edited by MARC Bot import existing book
October 22, 2008 Created by ImportBot Imported from University of Toronto MARC record